This article introduces the energy-saving electric and hot water washing type local exhaust gas treatment equipment in the factory, which uses high temperature 750℃ to heat and crack the gas generated by the chemical vapor deposition and dry etching process. After the temperature is lowered, the waste gas pipe is collected and introduced into the central scrubber of the factory system, and then treated by the wet scrubber of the factory and discharged into the atmosphere, so as to achieve the effect of energy saving and carbon reduction.
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