6/21 (b) clean room systems operation and management
| Time | Course name | Course description | The instructor |
| 09:00~10:00 |
Analysis on energy-saving measures |
Hu Shizheng | |
| 10:00~12:00 |
Semiconductor equipment fire and seismic safety practices |
SEMI S2 semiconductor devices in the EHS guidelines fire and seismic safety requirements. | Su Heng Li |
| 12:00~13:00 | Lunch | ||
| 13:00~14:00 |
Gaseous chemical contaminants (AMC) case study and control practice |
AMC issue of performance testing and selection of characteristic chemical filter analyses | Xie Ruihao |
| 14:00~15:00 |
AMC and PTFE filter case study |
High tech factory AMC issue features, examples and case studies | Guo Qizhang |
| 15:00~15:30 | tea time | ||
| 15:30~17:00 |
Energy efficiency case study and simulation software FES operation |
Characteristics of high-tech plant energy consumption, energy-saving examples and case studies |
Lin 廸 |
6/22 (iii) planning and design of clean room
| Time | Course name | Course description | The instructor |
| 09:00~10:00 |
Clean room concepts, standards, and design of program |
Respectively for international and national organizations in clean rooms and technical specification of design condition and clean room, clean room design program for instructions. | Hu Shizheng |
| 10:00~11:00 |
Air conditioning system planning |
Calculation of circulating air, clean room air conditioning loads, and air conditioning designs. | Lin 廸 |
| 11:00~12:00 |
Particle filter technology and systems planning |
Respectively, the characteristics of the filters, filtration rate and surface air filter the principle and the performance of filter test probe further. | Hu Mingquan |
| 12:00~13:00 | Lunch | ||
| 13:00~14:00 |
Clean room construction planning |
Clean room environment, line installation, construction planning. | Hu Shizheng |
| 14:00~15:00 |
Discussion on design of clean room |
Examples of large and small clean room design example | Lin 廸 |
| 15:00~15:30 | tea time | ||
| 15:30~17:00 |
Clean room TAB |
Clean room testing explain balance adjustments, and instruments implemented. | Lin 廸 |
6/23 (d) facility management and design of the system
| Time | Course name | Course description | The instructor |
| 09:00~10:00 |
Facility operation and management |
Plant platform for system operation management | Cai Junhong |
| 10:00~11:00 |
Management and design of compressed air system |
Compressed air systems and energy conservation programme | Huang Maoxing |
| 11:00~12:00 |
PCW systems management and design |
Made programme of chilled water system optimal design | Zhou Longbin |
| 12:00~13:00 | Lunch | ||
| 13:00~14:00 |
Gaseous chemical pollutants control of clean room design |
Performance test and selection of chemical filter design | Xue Renwei |
| 14:00~15:00 |
Local management and design of waste gas treatment system |
Local exhaust gas treatment device and method | Zeng Weiting |
| 15:00~15:30 | tea time | ||
| 15:30~16:30 |
Pure water system management and design |
Pure water process, methods and design | Wang Dongxin |